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Plasma is a state of matter in which an ionized gaseous substance becomes highly electrically conductive to the point that long-range electric and magnetic fields dominate the behaviour of the matter. The
plasma state can be contrasted with the other states: solid, liquid, and gas..
Plasma is an electrically neutral medium of unbound positive and negative particles (i.e. the ...
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etching nanoscale features because it can produce vertical sidewall profiles with little or no undercut. An example is shown in Figure 5.19.This anisotropic feature can be further enhanced by allowing the
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